Design for Manufacturability and Yield for Nano-Scale CMOS by Charles Chiang, Jamil Kawa

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By Charles Chiang, Jamil Kawa

This e-book walks the reader via the entire features of manufacturability and yield in a nano-CMOS technique. It covers all CAD/CAE features of a SOC layout circulation and addresses a brand new subject (DFM/DFY) severe at ninety nm and past. This e-book is a needs to learn publication the intense training IC dressmaker and a very good primer for any graduate pupil reason on having a profession in IC layout or in EDA software improvement.

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Additional resources for Design for Manufacturability and Yield for Nano-Scale CMOS (Integrated Circuits and Systems)

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2. 3. 3 Open CA on a Wire Caused by Particles with Size x Intra-layers Defect Particle Resulting in an Open or Short Basic Models of Yield for Random Defects We will be devoting the next four chapters to deal with all other aspects of yield. So, we will cover yield here only as it relates to critical area in order to give the reader an idea of why extracting critical area and minimizing it is important. 2) [9–12]. 1) Yr = e−Acr D0 . 2) where Yr denotes the random yield and D0 refers to the particle density.

Another benefit of the approximate method is that it makes CAA driven layout optimization possible. 1 Classical Methods of CA Extraction The shape expansion based method is designed to compute the critical area for a particular given defect size. The critical area needs to be recomputed if the defect size is changed. The average critical area is calculated by integrating these critical areas at different defect sizes with defect size distribution function. The Monte Carlo method does not limit itself to any specific defect size.

4) Where I is the index of refraction of the media in which the lens is working. For air I is 1 putting a theoretical upper limit of 1 on the NA of a lens in air. 4. 8 (α = 48◦ ) range attainable through lens in air. 4 Resolution Enhancement Techniques (RET) RET is defined as the set of optical and geometrical (layout) procedures performed individually or in any particular combination to enhance the printability of design features and to meet design intent. 4 demonstrates the need for OPC in sub-wavelength lithography.

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